Invention Grant
- Patent Title: Integrated driver process flow
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Application No.: US10161191Application Date: 2002-05-28
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Publication No.: US06767751B2Publication Date: 2004-07-27
- Inventor: James A. Hunter
- Applicant: James A. Hunter
- Main IPC: H01L2100
- IPC: H01L2100

Abstract:
An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.
Public/Granted literature
- US20030235932A1 INTEGRATED DRIVER PROCESS FLOW Public/Granted day:2003-12-25
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