Invention Grant
US06768159B2 Semiconductor device using a polysilicon layer 失效
使用多晶硅层的半导体器件

  • Patent Title: Semiconductor device using a polysilicon layer
  • Patent Title (中): 使用多晶硅层的半导体器件
  • Application No.: US10284333
    Application Date: 2002-10-31
  • Publication No.: US06768159B2
    Publication Date: 2004-07-27
  • Inventor: Eun Jeong ParkSung Chul Lee
  • Applicant: Eun Jeong ParkSung Chul Lee
  • Priority: KR97-17321 19970506
  • Main IPC: H01L29788
  • IPC: H01L29788
Semiconductor device using a polysilicon layer
Abstract:
A semiconductor device in which polysilicon is used to form source and drain regions in an initial process step so as to reduce resistance of bit lines and minimize a junction capacitance and thus improve its reliability, and a method for fabricating the same are disclosed, the semiconductor device including a semiconductor substrate, trenches formed in predetermined areas of the semiconductor substrate, an insulating layer formed in the trenches and beneath a surface of the substrate to have a recess, a polysilicon layer formed on the insulating layer in the trench, source and drain regions formed at both sides of the polysilicon layer beneath a surface of the semiconductor substrate, and gates formed over the semiconductor substrate.
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