Invention Grant
- Patent Title: Semiconductor device using a polysilicon layer
- Patent Title (中): 使用多晶硅层的半导体器件
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Application No.: US10284333Application Date: 2002-10-31
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Publication No.: US06768159B2Publication Date: 2004-07-27
- Inventor: Eun Jeong Park , Sung Chul Lee
- Applicant: Eun Jeong Park , Sung Chul Lee
- Priority: KR97-17321 19970506
- Main IPC: H01L29788
- IPC: H01L29788

Abstract:
A semiconductor device in which polysilicon is used to form source and drain regions in an initial process step so as to reduce resistance of bit lines and minimize a junction capacitance and thus improve its reliability, and a method for fabricating the same are disclosed, the semiconductor device including a semiconductor substrate, trenches formed in predetermined areas of the semiconductor substrate, an insulating layer formed in the trenches and beneath a surface of the substrate to have a recess, a polysilicon layer formed on the insulating layer in the trench, source and drain regions formed at both sides of the polysilicon layer beneath a surface of the semiconductor substrate, and gates formed over the semiconductor substrate.
Public/Granted literature
- US20030052362A1 Semiconductor device Public/Granted day:2003-03-20
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