发明授权
US06771011B2 Design structures of and simplified methods for forming field emission microtip electron emitters
失效
用于形成场发射微带电子发射体的设计结构和简化方法
- 专利标题: Design structures of and simplified methods for forming field emission microtip electron emitters
- 专利标题(中): 用于形成场发射微带电子发射体的设计结构和简化方法
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申请号: US10383966申请日: 2003-03-07
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公开(公告)号: US06771011B2公开(公告)日: 2004-08-03
- 发明人: Michael A. Maxim , Oleh Karpenko , Farshid Adibi-rizi , Brett E. Huff
- 申请人: Michael A. Maxim , Oleh Karpenko , Farshid Adibi-rizi , Brett E. Huff
- 主分类号: H01J1304
- IPC分类号: H01J1304
摘要:
Electron emission structures formed using standard semiconductor processes on a substrate first prepared with a topographical feature are disclosed. At least one layer of a first material is concurrently deposited on the substrate and etched from the substrate to form an atomically sharp feature. An at least one layer of a second material is deposited over the atomically sharp feature. A conductive layer is deposited over the at least one layer of the second material. A selected area of material is removed from the conductive layer and the at least one layer of second material to expose the atomically sharp feature. Finally, electrical connectivity is provided to elements of the electron emission structure.
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