Invention Grant
- Patent Title: Apparatus for producing a flux of charge carriers
- Patent Title (中): 用于产生电荷载流子的装置
-
Application No.: US09802975Application Date: 2001-03-12
-
Publication No.: US06771012B2Publication Date: 2004-08-03
- Inventor: Haroon Ahmed , David Hasko , Alex Driskill-Smith , David Arfon Williams
- Applicant: Haroon Ahmed , David Hasko , Alex Driskill-Smith , David Arfon Williams
- Priority: EP00302144 20000316
- Main IPC: H01J3773
- IPC: H01J3773

Abstract:
Apparatus for producing a flux of charge carriers that may be used in many applications including imaging and lithography comprises an electron source which includes an emitter with a tip radius of about one nanometer and a closely configured extractor, together with a specimen for receiving an electron beam from the source. The apparatus may operate in air under atmospheric conditions and at a much reduced operating voltage.
Public/Granted literature
- US20010040215A1 Apparatus for producing a flux of charge carriers Public/Granted day:2001-11-15
Information query