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US06771012B2 Apparatus for producing a flux of charge carriers 失效
用于产生电荷载流子的装置

Apparatus for producing a flux of charge carriers
Abstract:
Apparatus for producing a flux of charge carriers that may be used in many applications including imaging and lithography comprises an electron source which includes an emitter with a tip radius of about one nanometer and a closely configured extractor, together with a specimen for receiving an electron beam from the source. The apparatus may operate in air under atmospheric conditions and at a much reduced operating voltage.
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