发明授权
US06774654B2 Semiconductor-device inspecting apparatus and a method for manufacturing the same 失效
半导体装置检查装置及其制造方法

Semiconductor-device inspecting apparatus and a method for manufacturing the same
摘要:
A semiconductor inspecting apparatus having a plurality of electrical connection boards arranged in the inspecting apparatus and a plurality of probes respectively provided on a plurality of beams formed on a first board of said plurality of electrical connection boards, the probes being adapted to be individually brought into contact with a plurality of electrode pads of a semiconductor device for inspection, so as to inspect the semiconductor device while establishing electrical connection therebetween. A one-end supported beam is used as each of the beams, and each of the probes is formed at a portion shifted in a rectangular direction to a center line of a longitudinal direction of the one-end supported beam.
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