Invention Grant
- Patent Title: Method of observing a sample by a transmission electron microscope
- Patent Title (中): 通过透射电子显微镜观察样品的方法
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Application No.: US10353039Application Date: 2003-01-29
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Publication No.: US06777679B2Publication Date: 2004-08-17
- Inventor: Isao Nagaoki , Hiroyuki Kobayashi , Takafumi Yotsuji , Toshiyuki Ohyagi
- Applicant: Isao Nagaoki , Hiroyuki Kobayashi , Takafumi Yotsuji , Toshiyuki Ohyagi
- Priority: JP2002-089578 20020327
- Main IPC: H01J3726
- IPC: H01J3726

Abstract:
Automatically corrected is a movement of a field of view caused upon changing a magnification. A field of view is searched for with a first magnification. A sample stage coordinate of a designated subject of recording is computed, for storage, on a transmission electron beam image of a sample displayed on an image display section. A subject-of-recording image is cut out of the transmission electron beam image of the sample in the first magnification and stored as a first image. The magnification of the transmission electron microscope is set to a magnification twice a magnification in the recording mode, to move the sample stage to the stored sample stage coordinate of the subject of recording. The transmission electron beam image in the second magnification is captured with the same number of pixels as the first image to compute a movement amount of between the two images from a correlation intensity of the first and second images. Then, the transmission electron beam image in the second magnification is corrected in position with respect to imaging means such that the movement amount is zero, to store an obtained transmission electron beam image (S29).
Public/Granted literature
- US20030183762A1 Method of observing a sample by a transmission electron microscope Public/Granted day:2003-10-02
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