发明授权
- 专利标题： Optical waveguide with spot size changing core structure and method for manufacturing the same
- 专利标题（中）： 具有点尺寸变化的核心结构的光波导及其制造方法
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申请号： US10114975申请日： 2002-04-04
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公开(公告)号： US06778737B2公开(公告)日： 2004-08-17
- 发明人: Tsuyoshi Shimoda
- 申请人： Tsuyoshi Shimoda
- 优先权： JP2001-107428 20010405
- 主分类号： G02B626
- IPC分类号： G02B626
摘要：
In a method for manufacturing an optical waveguide, a core layer is formed on a clad layer, and a stepped portion in formed in the core layer. Then, a planar layer is formed on the core layer so that the planar layer completely covers the stepped portion of the core layer. Finally, the planar layer and the core layer are etched, so that the planar layer is completely removed and the core layer is converted into a tapered core layer.
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