Invention Grant
US06778751B2 Optical modulator and photonic semiconductor device 失效
光调制器和光子半导体器件

  • Patent Title: Optical modulator and photonic semiconductor device
  • Patent Title (中): 光调制器和光子半导体器件
  • Application No.: US09817058
    Application Date: 2001-03-27
  • Publication No.: US06778751B2
    Publication Date: 2004-08-17
  • Inventor: Hitoshi TadaKazuhisa Takagi
  • Applicant: Hitoshi TadaKazuhisa Takagi
  • Priority: JP2000-337472 20001106
  • Main IPC: G02B610
  • IPC: G02B610
Optical modulator and photonic semiconductor device
Abstract:
An optical waveguide ridge has a side with a flat portion extending uniformly from a top of the ridge to a surface of a semiconductor substrate, the flat portion being in contact with an exposed surface of the substrate. A p-type electrode extends from the top of the optical waveguide ridge downward in contact with a dielectric film on the flat portion of the optical waveguide ridge. The p-type electrode further extends over the dielectric film onto the exposed surface of the semiconductor substrate where an end of the electrode is a bonding pad.
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