Invention Grant
- Patent Title: Optical modulator and photonic semiconductor device
- Patent Title (中): 光调制器和光子半导体器件
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Application No.: US09817058Application Date: 2001-03-27
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Publication No.: US06778751B2Publication Date: 2004-08-17
- Inventor: Hitoshi Tada , Kazuhisa Takagi
- Applicant: Hitoshi Tada , Kazuhisa Takagi
- Priority: JP2000-337472 20001106
- Main IPC: G02B610
- IPC: G02B610

Abstract:
An optical waveguide ridge has a side with a flat portion extending uniformly from a top of the ridge to a surface of a semiconductor substrate, the flat portion being in contact with an exposed surface of the substrate. A p-type electrode extends from the top of the optical waveguide ridge downward in contact with a dielectric film on the flat portion of the optical waveguide ridge. The p-type electrode further extends over the dielectric film onto the exposed surface of the semiconductor substrate where an end of the electrode is a bonding pad.
Public/Granted literature
- US20020054724A1 Optical modulator, method for fabricating the same, and photonic semiconductor device Public/Granted day:2002-05-09
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