发明授权
US06780339B2 CMOS/MEMS integrated ink jet print head with oxide based lateral flow nozzle architecture and method of forming same
失效
CMOS / MEMS集成喷墨打印头与基于氧化物的侧流喷嘴结构及其形成方法
- 专利标题: CMOS/MEMS integrated ink jet print head with oxide based lateral flow nozzle architecture and method of forming same
- 专利标题(中): CMOS / MEMS集成喷墨打印头与基于氧化物的侧流喷嘴结构及其形成方法
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申请号: US10025363申请日: 2001-12-19
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公开(公告)号: US06780339B2公开(公告)日: 2004-08-24
- 发明人: Constantine N. Anagnostopoulos , John A. Lebens , Christopher N. Delametter
- 申请人: Constantine N. Anagnostopoulos , John A. Lebens , Christopher N. Delametter
- 主分类号: G01D1500
- IPC分类号: G01D1500
摘要:
A continuous ink jet print head is formed using a combination of traditional CMOS technology to form the various controlling electrical circuits on a silicon substrate having insulating layer(s) which provide electrical connections and a MEMS technology for forming nozzle openings. A blocking structure is formed in the insulating layer(s) between a first ink channel formed in the silicon substrate and a second ink channel formed in the insulating layer(s). The blocking structure causes ink to flow around the blocking structure and thereby develop lateral flow components to the liquid entering the second channel so that, for droplets selected for printing, as the stream of droplets emanates from the bore of the nozzle, there is provided a reduced amount of heat needed for operating a heating element adjacent each nozzle opening.
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