发明授权
- 专利标题: Field emission display device
- 专利标题(中): 场致发射显示装置
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申请号: US09998334申请日: 2001-12-03
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公开(公告)号: US06781159B2公开(公告)日: 2004-08-24
- 发明人: Linda T. Romano , David K. Biegelsen
- 申请人: Linda T. Romano , David K. Biegelsen
- 主分类号: H01L3300
- IPC分类号: H01L3300
摘要:
An improved nanotip structure and method for forming the nanotip structure and a display system using the improved nanotip structure is described. The described nanotip is formed from a semiconductor having a crystalline structure such as gallium nitride. The crystalline structure preferably forms dislocations oriented in the direction of the nanotips. One method of forming the nanotip structure uses the relatively slow etching rates that occur around the dislocations compared to the faster etch rates that occur in other parts of the semiconductor structure. The slower etching around dislocations enables the formation of relatively high aspect ratio nanotips in the dislocation area.
公开/授权文献
- US20030102476A1 Field emission display device 公开/授权日:2003-06-05
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