- 专利标题: Non-volatile memory device having floating trap type memory cell and method of forming the same
-
申请号: US10215504申请日: 2002-08-09
-
公开(公告)号: US06781193B2公开(公告)日: 2004-08-24
- 发明人: Chang-Hyun Lee , Jung-Dal Choi , Wang-Chul Shin
- 申请人: Chang-Hyun Lee , Jung-Dal Choi , Wang-Chul Shin
- 优先权: KR2001-47944 20010809
- 主分类号: H01L29792
- IPC分类号: H01L29792
摘要:
A non-volatile memory device includes a cell region having a memory gate pattern with a charge storage layer, and a peripheral region having a high-voltage-type gate pattern, a low-voltage-type gate pattern, and a resistor pattern. To fabricate the above memory device, a device isolation layer is formed in a substrate. Gate insulating layers having difference thickness are formed in low-and high-voltage regions of the peripheral region, respectively. A first conductive layer is formed over substantially the entire surface of a gate insulating layer in the peripheral region. A triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer and a second conductive layer are sequentially formed over substantially the entire surface of the substrate including the first conductive layer.
公开/授权文献
信息查询