发明授权
US06781281B2 Electrostatic microactuator having a movable piece between a pair of statical members
失效
静电微致动器具有在一对静止构件之间的可动件
- 专利标题： Electrostatic microactuator having a movable piece between a pair of statical members
- 专利标题（中）： 静电微致动器具有在一对静止构件之间的可动件
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申请号： US10243677申请日： 2002-09-16
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公开(公告)号： US06781281B2公开(公告)日： 2004-08-24
- 发明人: Akihiro Koga , Toshikatsu Akiba , Mitsunobu Yoshida , Shunsuke Hattori
- 申请人： Akihiro Koga , Toshikatsu Akiba , Mitsunobu Yoshida , Shunsuke Hattori
- 优先权： JP2001-283533 20010918
- 主分类号： H02N100
- IPC分类号： H02N100
摘要：
An object of the present invention is to provide an electrostatic actuator that can be easily assembled and suitably mass-produced and that can implement requirements of both the steady, smooth and stable operation and the enhanced reliability. The present invention is also directed to a method of activating such an electrostatic actuator, and a camera module used with the same.
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