发明授权
- 专利标题: Method for adjusting the temperature-dependent property of a surface acoustic wave device and a surface acoustic device
- 专利标题(中): 用于调节表面声波装置和表面声学装置的温度依赖性的方法
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申请号: US10229210申请日: 2002-08-28
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公开(公告)号: US06784595B2公开(公告)日: 2004-08-31
- 发明人: Keigo Iizawa , Takashi Yamazaki , Shigeo Kanna
- 申请人: Keigo Iizawa , Takashi Yamazaki , Shigeo Kanna
- 优先权: JP2001-260122 20010829; JP2002-164912 20020605
- 主分类号: H01L4108
- IPC分类号: H01L4108
摘要:
The invention provides a method for adjusting the temperature-dependent property of a surface acoustic wave device is provided,, The method is appropriate for a temperature-dependent property that is expressed by a cubic function of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate. The invention therefore provides a method for adjusting the temperature-dependent property of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate having Euler angles of (0°, 113-135°, ±(40-49°)). The range of Euler angles is defined so that the temperature-dependent property of the surface acoustic wave device, using an in-plane rotated ST cut quartz crystal plate having the temperature-dependent property expressed by a cubic function, has an extreme value within the temperature range of −40 to +85° C., and the temperature-dependent property is rotated about the inflection point to minimize the frequency fluctuation within the operational temperature range by using appropriate regions.
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