Invention Grant
- Patent Title: Semiconductor devices and methods of manufacturing the same
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US10357051Application Date: 2003-02-03
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Publication No.: US06787849B2Publication Date: 2004-09-07
- Inventor: Masahiro Hayashi
- Applicant: Masahiro Hayashi
- Priority: JP11-018665 19990127; JP11-348034 19991207
- Main IPC: H01L2972
- IPC: H01L2972

Abstract:
Embodiments include a semiconductor device including a well structure such that well areas can be formed with a higher density of integration and a plurality of high-voltage endurable transistors can be driven independently of one another with different voltages, and a method of manufacturing the semiconductor device. The semiconductor device may include a triple well comprising a first well formed in a silicon substrate and having a first conductivity type (P-type), a second well formed in adjacent relation to the first well and having a second conductivity type (N-type), and a third well formed in the second well and having the first conductivity type (P-type). A high-voltage endurable MOSFET is provided in each of the wells. Each MOSFET has an offset area in the corresponding well around a gate insulating layer. The offset area is formed of a low-density impurity layer which is provided under an offset LOCOS layer on the silicon substrate.
Public/Granted literature
- US20030141552A1 Semiconductor devices and methods of manufacturing the same Public/Granted day:2003-07-31
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