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US06787861B2 Non-crystalline oxides for use in microelectronic, optical, and other applications 失效
用于微电子，光学和其他应用的非结晶氧化物

  • Patent Title: Non-crystalline oxides for use in microelectronic, optical, and other applications
  • Patent Title (中): 用于微电子，光学和其他应用的非结晶氧化物
  • Application No.: US09891552
    Application Date: 2001-06-25
  • Publication No.: US06787861B2
    Publication Date: 2004-09-07
  • Inventor: Gerald Lucovsky , Gregory N. Parsons
  • Applicant: Gerald Lucovsky , Gregory N. Parsons
  • Main IPC: H01L2994
  • IPC: H01L2994
Non-crystalline oxides for use in microelectronic, optical, and other applications
Abstract:
The invention relates to non-crystalline oxides of formulas (I) and (II), and methods of forming the same, along with field effect transistors, articles of manufacture, and microelectronic devices comprising the non-crystalline oxides.
Abstract(Chinese):

本发明涉及式（I）和（II）的非结晶氧化物及其形成方法，以及场效应晶体管，制品和包含非晶氧化物的微电子器件。

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