发明授权
- 专利标题： Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies
- 专利标题（中）： 使用实时光信号进行晶圆级器件介电可靠性研究的方法与设备
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申请号： US10213882申请日： 2002-08-07
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公开(公告)号： US06788093B2公开(公告)日： 2004-09-07
- 发明人: John M. Aitren , Fen Chen , Kevin L. Condon , Mark F. Dionne , Gregory E. Nuttall
- 申请人： John M. Aitren , Fen Chen , Kevin L. Condon , Mark F. Dionne , Gregory E. Nuttall
- 主分类号： G01R3126
- IPC分类号： G01R3126
摘要：
A method and structure tests devices on a wafer by applying an electrical bias to the devices and simultaneously monitoring emitted light from all of the devices. The emitted light indicates locations of defective devices and records time-based images of the emitted light across the wafer.
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