Invention Grant
- Patent Title: Bi-stable micro-actuator and optical switch
- Patent Title (中): 双稳态微执行器和光开关
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Application No.: US10365370Application Date: 2003-02-12
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Publication No.: US06788840B2Publication Date: 2004-09-07
- Inventor: Robert E. Stewart , Agop H. Cherbettchian , Samuel Fersht , David B. Hall
- Applicant: Robert E. Stewart , Agop H. Cherbettchian , Samuel Fersht , David B. Hall
- Main IPC: G02B626
- IPC: G02B626

Abstract:
A bi-stable micro-actuator is formed from a first and a second silicon-on-insulator wafer fused together at an electrical contact layer. A cover with a V-groove defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on a transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. The mirror blocks or reflects the optical axis. An expandable structure applies a compressive force between the first and second point of support of the transfer member along a compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal applied to a heating element in the expandable structure reduces the compressive force, switching the transfer member to a second state.
Public/Granted literature
- US20030210849A1 Bi-stable micro-actuator and optical switch Public/Granted day:2003-11-13
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