Invention Grant
US06791071B2 Apparatus for measuring aperture size of near-field optical probe and method thereof
失效
用于测量近场光学探针的孔径尺寸的装置及其方法
- Patent Title: Apparatus for measuring aperture size of near-field optical probe and method thereof
- Patent Title (中): 用于测量近场光学探针的孔径尺寸的装置及其方法
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Application No.: US10242723Application Date: 2002-09-13
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Publication No.: US06791071B2Publication Date: 2004-09-14
- Inventor: Gi-myung Woo , Petrov Nikolai , Myung-bok Lee
- Applicant: Gi-myung Woo , Petrov Nikolai , Myung-bok Lee
- Priority: KR2001-57575 20010918
- Main IPC: G02B704
- IPC: G02B704

Abstract:
An apparatus and method for measuring an aperture of a near-field optical probe is provided. The apparatus includes a light source, an optical detector, and a filter. The light source radiates light to the near-field optical probe. The optical detector is positioned before the near-field optical probe and receives the light transmitted through the near-field optical probe to detect light intensity. The filter is disposed between the light source and the optical detector and transmits only light of wavelengths in a specific mode from the light transmitted through the near-field optical probe. Thus, an aperture diameter of the near-field optical probe can accurately be measured in real-time without damaging the near-field optical probe.
Public/Granted literature
- US20030057352A1 Apparatus for measuring aperture size of near-field optical probe and method thereof Public/Granted day:2003-03-27
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