公开(公告)号：US06835921B2

公开(公告)日：2004-12-28

申请号：US10269406

申请日：2002-10-11

申请人： Yakov Reznichenko ,  Torsten Platz

发明人： Yakov Reznichenko ,  Torsten Platz

IPC分类号： G02B704

CPC分类号： B41J2/465 ,  G02B7/32 ,  G02B27/40

摘要： An imaging system is disclosed including a first illumination source for producing a first illumination field, a modulation system for modulating the first illumination field, and an optical imaging system for directing the modulated illumination field to an imaging surface along a first optical path. In accordance with an embodiment, the imaging system includes a second illumination source for producing a second illumination field, a first sub-assembly, a second sub-assembly and a control assembly. The first sub-assembly is for directing the second illumination field toward the imaging surface along a second optical path that is different than and non-parallel with said first optical path. The first sub-assembly includes a beam splitter sub-assembly that includes a beam splitter and at least one lens. The second sub-assembly is for receiving a portion of the second illumination field from the imaging surface, and includes a lens and a sensor for producing a sensor output signal. The control assembly is for adjusting a focal point of the optical imaging system responsive to the sensor output signal.

摘要翻译： 公开了一种成像系统，包括用于产生第一照明场的第一照明源，用于调制第一照明场的调制系统，以及用于将经调制的照明场引导到沿着第一光路的成像表面的光学成像系统。 根据实施例，成像系统包括用于产生第二照明场的第二照明源，第一子组件，第二子组件和控制组件。 第一子组件用于沿着与所述第一光路不同并且不平行的第二光路将第二照明场引向成像表面。 第一子组件包括分束器子组件，其包括分束器和至少一个透镜。 第二子组件用于从成像表面接收第二照明场的一部分，并且包括用于产生传感器输出信号的透镜和传感器。 控制组件用于响应于传感器输出信号调整光学成像系统的焦点。

公开(公告)号：US06791071B2

公开(公告)日：2004-09-14

申请号：US10242723

申请日：2002-09-13

申请人： Gi-myung Woo ,  Petrov Nikolai ,  Myung-bok Lee

发明人： Gi-myung Woo ,  Petrov Nikolai ,  Myung-bok Lee

IPC分类号： G02B704

CPC分类号： G01Q60/22

摘要： An apparatus and method for measuring an aperture of a near-field optical probe is provided. The apparatus includes a light source, an optical detector, and a filter. The light source radiates light to the near-field optical probe. The optical detector is positioned before the near-field optical probe and receives the light transmitted through the near-field optical probe to detect light intensity. The filter is disposed between the light source and the optical detector and transmits only light of wavelengths in a specific mode from the light transmitted through the near-field optical probe. Thus, an aperture diameter of the near-field optical probe can accurately be measured in real-time without damaging the near-field optical probe.

摘要翻译： 提供了一种用于测量近场光学探针的孔径的装置和方法。 该装置包括光源，光学检测器和滤光器。 光源将光照射到近场光学探头。 光检测器位于近场光探头之前，并接收透过近场光探针的光以检测光强度。 滤光器设置在光源和光学检测器之间，并且仅透射通过近场光学探针的光仅透射特定模式的波长的光。 因此，近场光学探针的孔径可以精确地实时测量而不损坏近场光学探针。

公开(公告)号：US06744029B2

公开(公告)日：2004-06-01

申请号：US10391596

申请日：2003-03-20

申请人： Hiroaki Yasuda

发明人： Hiroaki Yasuda

IPC分类号： G02B704

CPC分类号： H04N1/4092 ,  G03B42/02

摘要： Radiation image information is read from a stimulable phosphor sheet by line sensors and corrected for shading by a shading corrector. Thereafter, the radiation image information is corrected for sharpness independently in main and auxiliary directions by a sharpness corrector using spatial filters which are selected from a spatial filter memory by a spatial filter selector according to recording or reading conditions.

摘要翻译： 通过线传感器从可刺激的荧光粉片读取辐射图像信息，并通过阴影校正器校正阴影。 此后，利用通过空间滤波器选择器从空间滤波器存储器根据记录或读取条件选择的空间滤波器的锐度校正器，在主方向和辅助方向上独立地校正辐射图像信息。

公开(公告)号：US06689998B1

公开(公告)日：2004-02-10

申请号：US09610232

申请日：2000-07-05

申请人： Edward C. Bremer

发明人： Edward C. Bremer

IPC分类号： G02B704

CPC分类号： G02B7/28

摘要： An automatic distancing, focusing and optical imaging apparatus for optical imaging of an object is disclosed, having at least one lens, a distancing sensor adapted to receive light rays representative of the image that travel through the lens, an imaging sensor adapted to receive light rays representative of the image that travel through the lens, and at least one processor coupled to the distancing sensor and the imaging sensor, the processor for controlling the movement of the imaging sensor to a position for optimal imaging and for processing the image received by the imaging sensor.

摘要翻译： 公开了一种用于物体的光学成像的自动距离，聚焦和光学成像设备，其具有至少一个透镜，适于接收代表穿过透镜的图像的光线的距离传感器，适于接收光线的成像传感器 代表穿过透镜的图像的至少一个处理器，以及耦合到距离传感器和成像传感器的至少一个处理器，用于控制成像传感器移动到用于最佳成像的位置并用于处理由成像接收的图像的处理器 传感器。

公开(公告)号：US06664526B2

公开(公告)日：2003-12-16

申请号：US09987125

申请日：2001-11-13

申请人： Kenya Yokoi

发明人： Kenya Yokoi

IPC分类号： G02B704

CPC分类号： G11B7/126 ,  G11B7/0045

摘要： A disk apparatus performs optical recording onto an optical disk with a record mark by using a light beam modulated in a manner of multi-pulse series, includes. A detection pulse generating part generates a detection pulse to replace the multi-pulse series; and a detection power control part controls the power of the detection pulse to be smaller than the power of the multi-pulse series.

公开(公告)号：US06288383B1

公开(公告)日：2001-09-11

申请号：US09425232

申请日：1999-10-25

申请人： Israel Urbach ,  Thomas Langer

发明人： Israel Urbach ,  Thomas Langer

IPC分类号： G02B704

CPC分类号： G01S17/107 ,  F41G7/226 ,  F41G7/2293 ,  G01S3/784 ,  G01S3/7864 ,  G01S3/7865 ,  G01S7/4811 ,  G01S17/42 ,  G01S17/89

摘要： A daylight operable, scan-free, laser spot locating device for locating a laser spot pointed at an object. The device includes (a) a laser spot detecting system including at least one laser spot detecting device and a first electronic system, the laser spot detecting system being for detecting the laser spot in its field of view; (b) a laser spot locating system including a charge transfer device, the charge transfer device featuring an array of radiation-sensitive elements and including snapshot and internal shutter functions, the laser spot locating system further including a second electronic system, the laser spot locating system being for locating the laser spot in its field of view; (c) an optical arrangement for simultaneously providing the laser spot detecting system and the laser spot locating system with substantially overlapping or substantially identical first and second frames, respectively; and (d) a communication medium for communicating between the first and second electronic systems, such that when the laser spot detecting system detects the laser spot in its field of view, the laser spot locating system is activated to locate the laser spot in terms of a deviation of the laser spot from a predefined location in its field of view.

摘要翻译： 用于定位指向物体的激光点的日光可操作的，无扫描的激光光斑定位装置。 该装置包括（a）包括至少一个激光点检测装置和第一电子系统的激光点检测系统，该激光点检测系统用于在其视场中检测激光点; （b）包括电荷转移装置的激光点定位系统，所述电荷转移装置具有辐射敏感元件阵列并且包括快照和内部快门功能，所述激光定位系统还包括第二电子系统，所述激光点定位 系统用于在其视野中定位激光光斑; （c）光学装置，用于分别同时提供具有基本上重叠或基本相同的第一和第二框架的激光点检测系统和激光光斑定位系统; 以及（d）用于在第一和第二电子系统之间进行通信的通信介质，使得当激光点检测系统在其视场中检测到激光点时，激活点定位系统被激活以将激光点定位在 在其视场中激光光斑与预定位置的偏差。

公开(公告)号：US06762397B2

公开(公告)日：2004-07-13

申请号：US10218727

申请日：2002-08-14

申请人： Tomohide Takami ,  Kenichi Sugiura

发明人： Tomohide Takami ,  Kenichi Sugiura

IPC分类号： G02B704

CPC分类号： G11B9/14 ,  G01Q80/00 ,  G11B9/1409 ,  G11B9/1472 ,  G11B9/149 ,  Y10S977/858 ,  Y10S977/947

摘要： The method of the present invention includes the steps of rotating a molecule having a predetermined structure by applying a first alternating current electromagnetic field to the molecule, wherein the first alternating current electromagnetic field is produced by an electromagnetic field generation means that is set to a predetermined phase, controlling a rotational phase of the molecule by applying a second electromagnetic field to the rotated molecule by an information recording means, detecting a signal using a signal detection means in accordance with a rotation of the molecule having the rotational phase which has been controlled, and outputting a shift between the phase of the first alternating current electromagnetic field and a phase of the detection signal from the signal detection means as information by an information reading means.

摘要翻译： 本发明的方法包括通过对分子施加第一交流电磁场来旋转具有预定结构的分子的步骤，其中第一交流电磁场由设定为预定的电磁场产生装置产生 通过信息记录装置对旋转的分子施加第二电磁场来控制分子的旋转相位，根据已经被控制的具有旋转相位的分子的旋转，使用信号检测装置检测信号， 并且通过信息读取装置输出来自信号检测装置的第一交流电磁场的相位与检测信号的相位之间的偏移作为信息。

公开(公告)号：US06753518B2

公开(公告)日：2004-06-22

申请号：US10012454

申请日：2001-12-12

申请人： Masahiro Watanabe ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

发明人： Masahiro Watanabe ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

IPC分类号： G02B704

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J37/21 ,  H01J37/222 ,  H01J37/226 ,  H01J37/265 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/20235 ,  H01J2237/20292 ,  H01J2237/216 ,  H01J2237/2445 ,  H01J2237/24578 ,  H01J2237/2482 ,  H01J2237/2487 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01J2237/2826 ,  H01J2237/304 ,  H01J2237/3175

摘要： An electron beam apparatus includes a movable table which mounts a specimen, an electron optical system including an electron beam source which emits electron beams, an element for deflecting the emitted electron beams, an objective lens for converging and irradiating the deflected electron beams onto the specimen mounted on the table, and a detector for detecting a secondary electron emanated from the specimen by the irradiation of the electron beams. A surface height detection unit is provided which optically detects a height of a surface of the specimen by projecting light onto the surface of the specimen from an oblique direction to the surface and detecting light reflected from the specimen. A focus controller is provided for focusing the electron beam onto the surface of the specimen by controlling a position of the table in a height direction in accordance with the height information from the surface height detection unit.

摘要翻译： 一种电子束装置，包括安装试件的可移动台，包括发射电子束的电子束源的电子光学系统，用于偏转发射的电子束的元件，用于会聚并将偏转的电子束照射到试样上的物镜 安装在桌子上的检测器和用于通过照射电子束来检测从样品发出的二次电子的检测器。 提供一种表面高度检测单元，其通过从表面倾斜的方向将样品投射到样品表面上并检测从样品反射的光来光学地检测样品的表面的高度。 提供了一种聚焦控制器，用于根据来自表面高度检测单元的高度信息控制桌子在高度方向上的位置，将电子束聚焦到样本表面上。

公开(公告)号：US06717125B2

公开(公告)日：2004-04-06

申请号：US10243238

申请日：2002-09-12

申请人： Guenter Schoeppe

发明人： Guenter Schoeppe

IPC分类号： G02B704

CPC分类号： G02B26/0875 ,  G02B21/006 ,  G02B21/16 ,  G02B21/244

摘要： Arrangement and method for focus monitoring in a microscope with digital image generation, preferably in a confocal microscope. The arrangement provides an additional, rotatably supported transparent optical component in the known construction of a microscope in front of a main beam splitter arranged in the beam path in the area of a parallel illumination beam path. According to the method, the images required for focus monitoring are recorded with a transparent optical component inclined by angle +&agr; or −&agr;. The images are checked for correlation of the image contents in the direction of beam displacement by pixel-by-pixel displacement. The determined displacement &Dgr;s at optimum correlation represents a measurement of the instantaneous focusing or defocusing. The suggested solution for focus monitoring is applicable with slight adaptations for all microscopes outfitted with digital image-generating methods and arrangements. In confocal microscopes, applicability to defocusing is limited in a range of about 5 to 8×&lgr;/NA2.

摘要翻译： 在具有数字图像生成的显微镜中的焦点监测的布置和方法，优选在共聚焦显微镜中。 该布置在布置在平行照明光束路径区域中的光束路径中的主分束器前面的已知显微镜结构中提供了另外的可旋转支撑的透明光学部件。 根据该方法，通过以角度+α或αα倾斜的透明光学部件记录聚焦监视所需的图像。 通过逐像素位移检查图像中的图像内容在光束位移方向上的相关性。 以最佳相关性确定的位移Deltas表示瞬时聚焦或散焦的测量。 建议的聚焦监测解决方案适用于配备数字图像生成方法和布置的所有显微镜的轻微调整。 在共焦显微镜中，散焦的适用性限制在约5至8xλ/ NA 2的范围内。

公开(公告)号：US06677565B1

公开(公告)日：2004-01-13

申请号：US09135734

申请日：1998-08-18

申请人： Michael Hermann Wahl ,  Kenneth Howard Womack ,  Phillip Gregory Roberts

发明人： Michael Hermann Wahl ,  Kenneth Howard Womack ,  Phillip Gregory Roberts

IPC分类号： G02B704

CPC分类号： G02B7/346 ,  G02B21/245

摘要： The present invention provides a method and apparatus for high-speed autofocus and tilt of an inspection surface in a microscope system. The method and apparatus herein described projects an array of spots, lines, circles, grids or other shapes on the surface to be adjusted. The superposition of the array on the surface is imaged by a CCD camera and captured for subsequent analysis. Analysis of the captured image determines both the distance and angle through which the surface must be adjusted to bring it into the focal plane of the optical system. Focus and tilt error is estimated by comparing image dilation and distortion with calibrated data.

摘要翻译： 本发明提供了一种用于显微镜系统中的检查表面的高速自动对焦和倾斜的方法和装置。 这里描述的方法和装置在要调节的表面上投射一系列点，线，圆，网格或其它形状。 表面上阵列的叠加由CCD照相机成像，并被捕获用于随后的分析。 拍摄图像的分析确定了必须调整表面以使其进入光学系统的焦平面的距离和角度。 通过将图像扩张和失真与校准数据进行比较来估计焦点和倾斜误差。