发明授权
- 专利标题: Image compensation device for a scanning electron microscope
- 专利标题(中): 用于扫描电子显微镜的图像补偿装置
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申请号: US10207551申请日: 2002-07-29
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公开(公告)号: US06791083B2公开(公告)日: 2004-09-14
- 发明人: Kevin Chan Ee Peng , Yelehanka Ramachandramurthy Pradeep , Chua Thow Phock
- 申请人: Kevin Chan Ee Peng , Yelehanka Ramachandramurthy Pradeep , Chua Thow Phock
- 主分类号: G01N2300
- IPC分类号: G01N2300
摘要:
An apparatus for preventing distortion to critical dimension line images formed by a SEM under the influence of external electro-magnetic emissions generating by neighboring manufacturing equipment. The external emission causes a high three sigma A/C component. The correcting apparatus includes an external shielding coil mounted to the column housing of the SEM. A control electro-emission driver is mounted to the external shielding coil in which a variable voltage divider having a transformer with a variable resistor. The variable resistor is adjusted varying the amplitude of the sine wave of the A/C signal thus controlling the electro-emission driver while reducing the effects of the three sigma A/C component.
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