- 专利标题: Dual work function CMOS gate technology based on metal interdiffusion
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申请号: US10315476申请日: 2002-12-09
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公开(公告)号: US06794234B2公开(公告)日: 2004-09-21
- 发明人: Igor Polishchuk , Pushkar Ranade , Tsu-Jae King , Chenming Hu
- 申请人: Igor Polishchuk , Pushkar Ranade , Tsu-Jae King , Chenming Hu
- 主分类号: H01L218238
- IPC分类号: H01L218238
摘要:
A gate structure for a MOSFET device comprises a gate insulation layer, a first layer of a first metal abutting the gate insulation layer, and a second layer overlying the first layer and comprising a mixture of the metal of the first layer and a second metal, the metal layers formed by the diffusion of the first metal into and through the second metal. The second metal can be used as the gate for a n-MOS transistor, and the mixture of first metal and second metal overlying a layer of the first metal can be used as a gate for a p-MOS transistor where the first metal has a work function of about 5.2 eV and the second metal has a work function of about 4.1 eV.
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