Invention Grant
- Patent Title: Stabilized oscillator circuit for plasma density measurement
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Application No.: US10650802Application Date: 2003-08-29
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Publication No.: US06799532B2Publication Date: 2004-10-05
- Inventor: Murray D. Sirkis , Joseph T. Verdeyen
- Applicant: Murray D. Sirkis , Joseph T. Verdeyen
- Main IPC: C23C1600
- IPC: C23C1600

Abstract:
A method and system for controlling electron densities in a plasma processing system. By applying a dither voltage and a correction voltage to a voltage-controlled oscillator, electron (plasma) density of a plasma processing system (acting as an open resonator) may be measured and controlled as part of a plasma-based process.
Public/Granted literature
- US20040007983A1 Stabilized oscillator circuit for plasma density measurement Public/Granted day:2004-01-15
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