发明授权
- 专利标题: Flip-chip bonding structure and method for making the same
- 专利标题(中): 倒装片结合结构及其制造方法
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申请号: US10654111申请日: 2003-09-03
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公开(公告)号: US06799713B2公开(公告)日: 2004-10-05
- 发明人: Joo-Hoon Lee , Duk-Yong Choi , Dong-Su Kim
- 申请人: Joo-Hoon Lee , Duk-Yong Choi , Dong-Su Kim
- 优先权: KR2002-11511 20020305
- 主分类号: B23K3102
- IPC分类号: B23K3102
摘要:
Disclosed are a flip-chip bonding structure for improving the vertical alignment of an optical device relative to a PLC and a flip-chip bonding method for achieving this structure. The flip-chip bonding structure includes: a semiconductor substrate; a lower-clad layer formed on the upper surface of the semiconductor substrate, wherein the lower-clad layer is depressed on a designated area for mounting an optical device; vertical alignment structures formed on a part of the upper surface of the depressed area of the lower-clad layer and determining a vertical alignment position of the optical device on the semiconductor substrate; electrodes formed on another part of the upper surface of the depressed area of the lower-clad layer; a solder bump formed on the upper surfaces of the electrodes; and, an optical device bonded to the substrate by a flip-chip bonding method using the solder bump.
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