发明授权
US06799713B2 Flip-chip bonding structure and method for making the same 失效
倒装片结合结构及其制造方法

  • 专利标题: Flip-chip bonding structure and method for making the same
  • 专利标题(中): 倒装片结合结构及其制造方法
  • 申请号: US10654111
    申请日: 2003-09-03
  • 公开(公告)号: US06799713B2
    公开(公告)日: 2004-10-05
  • 发明人: Joo-Hoon LeeDuk-Yong ChoiDong-Su Kim
  • 申请人: Joo-Hoon LeeDuk-Yong ChoiDong-Su Kim
  • 优先权: KR2002-11511 20020305
  • 主分类号: B23K3102
  • IPC分类号: B23K3102
Flip-chip bonding structure and method for making the same
摘要:
Disclosed are a flip-chip bonding structure for improving the vertical alignment of an optical device relative to a PLC and a flip-chip bonding method for achieving this structure. The flip-chip bonding structure includes: a semiconductor substrate; a lower-clad layer formed on the upper surface of the semiconductor substrate, wherein the lower-clad layer is depressed on a designated area for mounting an optical device; vertical alignment structures formed on a part of the upper surface of the depressed area of the lower-clad layer and determining a vertical alignment position of the optical device on the semiconductor substrate; electrodes formed on another part of the upper surface of the depressed area of the lower-clad layer; a solder bump formed on the upper surfaces of the electrodes; and, an optical device bonded to the substrate by a flip-chip bonding method using the solder bump.
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