Invention Grant
- Patent Title: Method and device for plasma coating surfaces
- Patent Title (中): 等离子涂层表面的方法和装置
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Application No.: US10111864Application Date: 2002-04-29
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Publication No.: US06800336B1Publication Date: 2004-10-05
- Inventor: Peter Förnsel , Christian Buske , Uwe Hartmann , Alfred Baalmann , Guido Ellinghorst , Klaus D Vissing
- Applicant: Peter Förnsel , Christian Buske , Uwe Hartmann , Alfred Baalmann , Guido Ellinghorst , Klaus D Vissing
- Priority: DE29919142 19991030
- Main IPC: C23C16503
- IPC: C23C16503

Abstract:
A method for coating surfaces, for which a precursor material is caused to react with the help of plasma and the reaction product is deposited on a surface, the reaction as well as the deposition taking place at atmospheric pressure, such that a plasma jet is generated by passing a working gas through an excitation zone and the precursor material is supplied with a lance separately from the working gas to the plasma jet.
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