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公开(公告)号:US06800336B1
公开(公告)日:2004-10-05
申请号:US10111864
申请日:2002-04-29
申请人: Peter Förnsel , Christian Buske , Uwe Hartmann , Alfred Baalmann , Guido Ellinghorst , Klaus D Vissing
发明人: Peter Förnsel , Christian Buske , Uwe Hartmann , Alfred Baalmann , Guido Ellinghorst , Klaus D Vissing
IPC分类号: C23C16503
摘要: A method for coating surfaces, for which a precursor material is caused to react with the help of plasma and the reaction product is deposited on a surface, the reaction as well as the deposition taking place at atmospheric pressure, such that a plasma jet is generated by passing a working gas through an excitation zone and the precursor material is supplied with a lance separately from the working gas to the plasma jet.
摘要翻译: 一种用于涂覆表面的方法,其中使前体材料在等离子体的帮助下反应,并且反应产物沉积在表面上,反应以及沉积在大气压下发生,使得产生等离子体射流 通过使工作气体通过激发区域,并且将前体材料与工作气体分离地供应到等离子体射流。