Invention Grant
- Patent Title: Electromagnetically levitated substrate support
- Patent Title (中): 电磁悬浮底物载体
-
Application No.: US10114014Application Date: 2002-03-29
-
Publication No.: US06800833B2Publication Date: 2004-10-05
- Inventor: Mariusch Gregor , Peter Reimer , Vincent Seidl
- Applicant: Mariusch Gregor , Peter Reimer , Vincent Seidl
- Main IPC: F27B514
- IPC: F27B514

Abstract:
An apparatus for supporting a substrate and a method for positioning a substrate include a substrate support, a stator circumscribing the substrate support, and an actuator. The actuator is coupled to the stator and adapted to change the elevation of the stator and/or adjust an angular orientation of the stator relative to its central axis. As the substrate support is magnetically coupled to the stator, a position, i.e., elevation and angular orientation, of the substrate support may be controlled.
Public/Granted literature
- US20030183611A1 Electromagnetically levitated substrate support Public/Granted day:2003-10-02
Information query