公开(公告)号：US20070183869A1

公开(公告)日：2007-08-09

申请号：US11734492

申请日：2007-04-12

Applicant: Sungmin Cho ,  Peter Reimer ,  Vincent Seidl

Inventor： Sungmin Cho ,  Peter Reimer ,  Vincent Seidl

IPC: H01L21/677

CPC classification number: H01L21/682 ,  H01L21/67259 ,  H01L21/67265 ,  H01L21/67379 ,  H01L21/67772 ,  H01L21/67775

Abstract: An apparatus for docking a substrate storage pod to a factory interface is provided. In one embodiment, an apparatus for docking a substrate storage pod to a factory interface includes a docking station having a substantially horizontal flange extending from a substantially vertical wall. The wall has an aperture formed therethrough. A stage is movably coupled to the flange and adapted to support the substrate storage pod. An engagement mechanism and docking actuator are coupled to the stage. The engagement mechanism is adapted to secure the substrate storage pod to the stage. The docking actuator is adapted to move substrate storage cassette against the bay. A release mechanism is adapted to decouple at least one of the engagement mechanism from the pod or the stage from the docking actuator, thereby facilitating access to the pod in the event of one or more of the actuators becoming immobilized.

Abstract translation: 提供了用于将衬底存储盒对接到工厂接口的装置。 在一个实施例中，用于将衬底存储盒对接到工厂接口的设备包括具有从基本垂直的壁延伸的基本上水平的凸缘的对接站。 壁具有穿过其中形成的孔。 平台可移动地联接到凸缘并且适于支撑基板存储盒。 接合机构和对接致动器联接到该台。 接合机构适于将基板储存盒固定到载物台上。 对接致动器适于将基板存储盒移动到隔间。 释放机构适于将接合机构中的至少一个与荚或台与对接致动器分离，从而在一个或多个致动器变得固定的情况下便于进入荚。

公开(公告)号：US07204669B2

公开(公告)日：2007-04-17

申请号：US10198688

申请日：2002-07-17

Applicant: Sungmin Cho ,  Peter Reimer ,  Vincent Seidl

Inventor： Sungmin Cho ,  Peter Reimer ,  Vincent Seidl

IPC: B65G49/07

CPC classification number: H01L21/682 ,  H01L21/67259 ,  H01L21/67265 ,  H01L21/67379 ,  H01L21/67772 ,  H01L21/67775

Abstract: A method and apparatus for preventing substrate damage in a factory interface. In one embodiment, a method for preventing substrate damage in a factory interface includes the steps of receiving an indicia of potential substrate damage, and automatically preventing substrates from moving out of a substrate storage cassette in response to the received indicia. The indicia may be a seismic warning signal, among others. In another embodiment, a method for preventing substrate damage in a factory interface includes the steps of moving a pod door in a first direction to a position spaced-apart and adjacent a pod, and moving the pod door laterally in a second direction to close the pod. The lateral closing motion of the pod door urges substrates, which may be misaligned in the pod, into a predefined position within the pod.

Abstract translation: 一种用于在工厂界面中防止基板损坏的方法和装置。 在一个实施例中，用于在工厂界面中防止基板损坏的方法包括以下步骤：接收潜在的基板损坏的标记，并且响应于所接收的标记自动地防止基板移出基板存储盒。 标记可能是地震预警信号等。 在另一个实施例中，用于防止在工厂界面中的基板损坏的方法包括以下步骤：将第一方向上的荚果门移动到间隔开并邻近荚果的位置，并且沿着第二方向横向移动荚果门以关闭 荚。 荚门的侧向关闭运动促使可能在荚中错位的基底进入荚内的预定位置。

公开(公告)号：US06800833B2

公开(公告)日：2004-10-05

申请号：US10114014

申请日：2002-03-29

Applicant: Mariusch Gregor ,  Peter Reimer ,  Vincent Seidl

Inventor： Mariusch Gregor ,  Peter Reimer ,  Vincent Seidl

IPC: F27B514

CPC classification number: H01L21/68792 ,  C30B25/12 ,  C30B31/14

Abstract: An apparatus for supporting a substrate and a method for positioning a substrate include a substrate support, a stator circumscribing the substrate support, and an actuator. The actuator is coupled to the stator and adapted to change the elevation of the stator and/or adjust an angular orientation of the stator relative to its central axis. As the substrate support is magnetically coupled to the stator, a position, i.e., elevation and angular orientation, of the substrate support may be controlled.

Abstract translation: 用于支撑基板的设备和用于定位基板的方法包括基板支撑件，限定基板支撑件的定子和致动器。 致动器联接到定子并且适于改变定子的高度和/或调节定子相对于其中心轴线的角度取向。 当衬底支撑件磁耦合到定子时，可以控制衬底支撑件的位置，即高度和角度取向。