Invention Grant
- Patent Title: Apparatus and method for controlling plating uniformity
- Patent Title (中): 用于控制电镀均匀性的装置和方法
-
Application No.: US10304175Application Date: 2002-11-26
-
Publication No.: US06802950B2Publication Date: 2004-10-12
- Inventor: John T. Hachman, Jr. , James J. Kelly , Alan C. West
- Applicant: John T. Hachman, Jr. , James J. Kelly , Alan C. West
- Main IPC: C25D2112
- IPC: C25D2112

Abstract:
The use of an insulating shield for improving the current distribution in an electrochemical plating bath is disclosed. Numerical analysis is used to evaluate the influence of shield shape and position on plating uniformity. Simulation results are compared to experimental data for nickel deposition from a nickel—sulfamate bath. The shield is shown to improve the average current density at a plating surface.
Public/Granted literature
- US20040099532A1 Apparatus and method for controlling plating uniformity Public/Granted day:2004-05-27
Information query