Invention Grant
US06803260B2 Method of horizontally growing carbon nanotubes and field effect transistor using the carbon nanotubes grown by the method
失效
使用通过该方法生长的碳纳米管水平生长碳纳米管和场效应晶体管的方法
- Patent Title: Method of horizontally growing carbon nanotubes and field effect transistor using the carbon nanotubes grown by the method
- Patent Title (中): 使用通过该方法生长的碳纳米管水平生长碳纳米管和场效应晶体管的方法
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Application No.: US10273188Application Date: 2002-10-18
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Publication No.: US06803260B2Publication Date: 2004-10-12
- Inventor: Jin Koog Shin , Kyu Tae Kim , Min Jae Jung , Sang Soo Yoon , Young Soo Han , Jae Eun Lee
- Applicant: Jin Koog Shin , Kyu Tae Kim , Min Jae Jung , Sang Soo Yoon , Young Soo Han , Jae Eun Lee
- Priority: KR2000/41012 20000718; KR2000/68966 20001120; KR2001/34013 20010615; KR2001/37496 20010628
- Main IPC: H01L21335
- IPC: H01L21335

Abstract:
Disclosed is a method of horizontally growing carbon nanotubes, in which the carbon nanotubes can be selectively grown in a horizontal direction at specific locations of a substrate having catalyst formed thereat, so that the method can be usefully utilized in fabricating nano-devices. The method includes the steps of: (a) forming a predetermined catalyst pattern on a first substrate; (b) forming a vertical growth preventing layer on the first substrate, which prevents carbon nanotubes from growing in a vertical direction; (c) forming apertures through the vertical growth preventing layer and the first substrate to expose the catalyst pattern through the apertures; and (d) synthesizing carbon nanotubes at exposed surfaces of the catalyst pattern in order to grow the carbon nanotubes in the horizontal direction.
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