SAW filter using tetrahedral amorphous carbon and method for manufacturing the same
    3.
    发明授权
    SAW filter using tetrahedral amorphous carbon and method for manufacturing the same 失效
    使用四面体无定形碳的SAW滤波器及其制造方法

    公开(公告)号:US06806795B2

    公开(公告)日:2004-10-19

    申请号:US10408269

    申请日:2003-04-08

    申请人: Jin Koog Shin

    发明人: Jin Koog Shin

    IPC分类号: H03H308

    摘要: Disclosed is an element using a piezoelectric characteristic, and in particular, an SAW filter and a method for manufacturing the same. The SAW filter according to the invention is resistant to input wave of high power by employing ta-C or CNT as an acoustic wave transmission medium. The method for manufacturing the SAW filter according to the invention simplified the manufacturing process and reduced a transmission loss as well noise.

    摘要翻译: 公开了使用压电特性的元件,特别是SAW滤波器及其制造方法。 根据本发明的SAW滤波器通过采用ta-C或CNT作为声波传输介质来抵抗高功率的输入波。 根据本发明的用于制造SAW滤波器的方法简化了制造过程并降低了传输损耗以及噪声。

    ATOMIC FORCE MICROSCOPE CANTILEVER INCLUDING FIELD EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
    5.
    发明申请
    ATOMIC FORCE MICROSCOPE CANTILEVER INCLUDING FIELD EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME 失效
    含有场效应晶体管的原子力显微镜及其制造方法

    公开(公告)号:US20080016953A1

    公开(公告)日:2008-01-24

    申请号:US11614489

    申请日:2006-12-21

    IPC分类号: G01B5/28

    CPC分类号: G01Q60/30 G01Q60/38

    摘要: The present invention relates to an AFM(atomic force microscope) cantilever including a field effect transistor(FET) and a method for manufacturing the same; and, more particularly, to a method for manufacturing an AFM cantilever including an FET formed by a photolithography process, wherein an effective channel length of the FET is a nono-scale. Therefore, The present invention can easily implement a simulation for manufacturing the AFM cantilever including he FET by accurately controlling the effective channel length. And also, the present invention can manufacturer the AFM cantilever including the FET having the effective channel ranging several tens to several hundreds nanometers by applying the low price photolithography device, thereby enhancing an accuracy and yield of the manufacturing process and drastically reducing process costs.

    摘要翻译: 本发明涉及包括场效应晶体管(FET)的AFM(原子力显微镜)悬臂及其制造方法; 更具体地,涉及一种制造包括通过光刻工艺形成的FET的AFM悬臂的方法,其中FET的有效沟道长度是非标尺的。 因此,通过精确地控制有效通道长度,本发明可以容易地实现用于制造包括他的AFM的AFM悬臂的模拟。 而且,本发明还可以通过应用低价光刻装置来制造包括具有几十到几百纳米的有效通道的AFM的AFM悬臂,从而提高制造工艺的精度和产量,并显着降低工艺成本。

    Inductor employing carbon nanotube and/or carbon nanofiber
    9.
    发明授权
    Inductor employing carbon nanotube and/or carbon nanofiber 失效
    采用碳纳米管和/或碳纳米纤维的电感器

    公开(公告)号:US06784779B2

    公开(公告)日:2004-08-31

    申请号:US09888559

    申请日:2001-06-26

    IPC分类号: H01F500

    摘要: Disclosed is an inductor, which employs carbon nanotubes and/or carbon nanofibers synthesized in a shape of coils, so that the inductor has a high inductance even in a minute circuit of a nano-size or a micro-size. The inductor may have a carbon nanotube and/or carbon nanofiber synthesized in a shape of a coil, in which the carbon nanotube and/or carbon nanofiber is synthesized between catalysts fixed at desired locations on

    摘要翻译: 公开了一种电感器,其采用以线圈形式合成的碳纳米管和/或碳纳米纤维,使得即使在纳米尺寸或微尺寸的微小电路中,电感器也具有高电感。 电感器可以具有以线圈形式合成的碳纳米管和/或碳纳米纤维,其中碳纳米管和/或碳纳米纤维在固定在期望位置上的催化剂之间合成