发明授权
- 专利标题: Movable-body apparatus, optical deflector, and method of fabricating the same
- 专利标题(中): 移动体装置,光学偏转器及其制造方法
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申请号: US10073311申请日: 2002-02-13
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公开(公告)号: US06803843B2公开(公告)日: 2004-10-12
- 发明人: Takahisa Kato , Hidemasa Mizutani , Takayuki Yagi , Yasuhiro Shimada , Susumu Yasuda , Takayuki Teshima , Futoshi Hirose
- 申请人: Takahisa Kato , Hidemasa Mizutani , Takayuki Yagi , Yasuhiro Shimada , Susumu Yasuda , Takayuki Teshima , Futoshi Hirose
- 优先权: JP2001/047300 20010222; JP2001/211035 20010711; JP2001/278957 20010914
- 主分类号: H01H5122
- IPC分类号: H01H5122
摘要:
The movable-body apparatus includes a support member, a movable body, an elastic supporting unit having a twisting longitudinal axis, and a driving unit for tilting the movable body in a tilting direction about the twisting longitudinal axis. The elastic supporting unit supports the movable body flexibly and rotatably about the twisting longitudinal axis relative to the support member. The driving unit includes a stationary portion provided apart from the movable body, and a moving core formed of a magnetic material, provided on a portion of the movable body, and has a face opposed to the stationary portion.
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