发明授权
US06803843B2 Movable-body apparatus, optical deflector, and method of fabricating the same 失效
移动体装置,光学偏转器及其制造方法

Movable-body apparatus, optical deflector, and method of fabricating the same
摘要:
The movable-body apparatus includes a support member, a movable body, an elastic supporting unit having a twisting longitudinal axis, and a driving unit for tilting the movable body in a tilting direction about the twisting longitudinal axis. The elastic supporting unit supports the movable body flexibly and rotatably about the twisting longitudinal axis relative to the support member. The driving unit includes a stationary portion provided apart from the movable body, and a moving core formed of a magnetic material, provided on a portion of the movable body, and has a face opposed to the stationary portion.
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