Invention Grant
US06804444B2 Optical waveguide platform and manufacturing method thereof 失效
光波导平台及其制造方法

Optical waveguide platform and manufacturing method thereof
Abstract:
An optical waveguide platform and a manufacturing method thereof are provided. In the provided optical waveguide platform, a terrace on which an optical device is mounted is formed by using an etch stopper pattern formed on a lower clad layer. Therefore, the optical device is mounted without processing a silicon substrate. In addition, in the provided optical waveguide platform, the etch stopper pattern is formed on the lower clad layer to prevent defocus in a photolithography process due to an etch step, so as not to damage a fine waveguide pattern. Moreover, an optical waveguide is formed on the terrace in manufacturing the optical waveguide platform to examine the characteristics of the optical waveguide device before etching a trench.
Public/Granted literature
Information query
Patent Agency Ranking
0/0