发明授权
US06805541B1 Resin encapsulating apparatus used in a manufacture of a semiconductor device 失效
用于制造半导体器件的树脂封装装置

  • 专利标题: Resin encapsulating apparatus used in a manufacture of a semiconductor device
  • 专利标题(中): 用于制造半导体器件的树脂封装装置
  • 申请号: US09503170
    申请日: 2000-02-14
  • 公开(公告)号: US06805541B1
    公开(公告)日: 2004-10-19
  • 发明人: Kenji Hashimoto
  • 申请人: Kenji Hashimoto
  • 优先权: JP11-035464 19990215
  • 主分类号: H01L2156
  • IPC分类号: H01L2156
Resin encapsulating apparatus used in a manufacture of a semiconductor device
摘要:
A semiconductor device is retained on a retaining section. A mask is set on the semiconductor device and has an opening at which part of the semiconductor device is exposed. An extruding section is moved by a first drive section over an opening in the mask and, during this movement, extrudes a fluidizing resin into the opening in the mask. A squeegee is moved by a second drive section over the opening in the mask to allow a movement of the fluidizing resin present over the opening which is extruded into the opening from an extruding section and a removal of any excessive resin from the plane of the opening.
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