发明授权
- 专利标题: Microforce measurement method and apparatus
- 专利标题(中): 微力测量方法和装置
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申请号: US10262067申请日: 2002-10-02
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公开(公告)号: US06806958B2公开(公告)日: 2004-10-19
- 发明人: Hiroaki Kojima , Kazuhiro Oiwa , Brenner Bernhard
- 申请人: Hiroaki Kojima , Kazuhiro Oiwa , Brenner Bernhard
- 优先权: JP2001-308744 20011004
- 主分类号: G01B902
- IPC分类号: G01B902
摘要:
A method and an apparatus for measuring the microforce acting between a micro particle fixed on the probe and the observation plane are described. The probe is feedback-controlled to be held motionless by canceling probe displacements caused by movements of the micro particle fixed on the probe, using irradiation pressure provided by a laser that applies photon pressure. The microforce acting between the micro particle fixed on the probe and the observation plane is measured by recording the time-varying laser output power. This allows probe fluctuations to be reduced to a few angstroms, and permits control of the distance to the target object to within a few nm, enabling measurement of microforces on the order of 0.1 pN.
公开/授权文献
- US20030086094A1 Microforce measurement method and apparatus 公开/授权日:2003-05-08
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