发明授权
US06808742B2 Preparation of thin silica films with controlled thickness and tunable refractive index 失效
制备具有可控厚度和可调折射率的薄二氧化硅薄膜

  • 专利标题: Preparation of thin silica films with controlled thickness and tunable refractive index
  • 专利标题(中): 制备具有可控厚度和可调折射率的薄二氧化硅薄膜
  • 申请号: US10384188
    申请日: 2003-03-07
  • 公开(公告)号: US06808742B2
    公开(公告)日: 2004-10-26
  • 发明人: Jason H. RouseGregory S. Ferguson
  • 申请人: Jason H. RouseGregory S. Ferguson
  • 主分类号: B05D506
  • IPC分类号: B05D506
Preparation of thin silica films with controlled thickness and tunable refractive index
摘要:
A method of forming a porous silica film includes the following steps: a) providing a substrate; b) coating, on a surface of the substrate, a layer of charged polyelectrolyte; and c) applying an aged silica-bearing non-colloidal solution to the coated surface of the substrate to adsorb porous silica thereon. The adsorption cycle of steps (b) and (c) is repeated a number of times to control film thickness. The age and concentration of the silica-bearing solution are selected to control the porosity and the index of refraction of the porous silica film.
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