Invention Grant
US06808987B2 Vertical nitride read-only memory cell and method for forming the same
有权
垂直氮化物只读存储单元及其形成方法
- Patent Title: Vertical nitride read-only memory cell and method for forming the same
- Patent Title (中): 垂直氮化物只读存储单元及其形成方法
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Application No.: US10460796Application Date: 2003-06-12
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Publication No.: US06808987B2Publication Date: 2004-10-26
- Inventor: Ching-Nan Hsiao , Ying-Cheng Chuang
- Applicant: Ching-Nan Hsiao , Ying-Cheng Chuang
- Priority: TW92105586A 20030314
- Main IPC: H01L21336
- IPC: H01L21336

Abstract:
A method for forming a vertical nitride read-only memory cell. A substrate having at least one trench is provided. A first conductive layer is formed in the lower trench and insulated from the substrate to serve as a source line. A first doping region is formed in the substrate adjacent to the top of the first conductive layer. A first insulating layer is formed on the first conductive layer. A second doping region is formed in the substrate adjacent to the top of the trench. A second insulating layer is formed over the sidewall of the trench and on the first insulating layer to serve as a gate dielectric layer. A second conductive layer is formed in the upper trench to serve as a control gate. A vertical nitride read-only memory cell is also disclosed.
Public/Granted literature
- US20040180496A1 Vertical nitride read-only memory cell and method for forming the same Public/Granted day:2004-09-16
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