Invention Grant
US06808987B2 Vertical nitride read-only memory cell and method for forming the same 有权
垂直氮化物只读存储单元及其形成方法

  • Patent Title: Vertical nitride read-only memory cell and method for forming the same
  • Patent Title (中): 垂直氮化物只读存储单元及其形成方法
  • Application No.: US10460796
    Application Date: 2003-06-12
  • Publication No.: US06808987B2
    Publication Date: 2004-10-26
  • Inventor: Ching-Nan HsiaoYing-Cheng Chuang
  • Applicant: Ching-Nan HsiaoYing-Cheng Chuang
  • Priority: TW92105586A 20030314
  • Main IPC: H01L21336
  • IPC: H01L21336
Vertical nitride read-only memory cell and method for forming the same
Abstract:
A method for forming a vertical nitride read-only memory cell. A substrate having at least one trench is provided. A first conductive layer is formed in the lower trench and insulated from the substrate to serve as a source line. A first doping region is formed in the substrate adjacent to the top of the first conductive layer. A first insulating layer is formed on the first conductive layer. A second doping region is formed in the substrate adjacent to the top of the trench. A second insulating layer is formed over the sidewall of the trench and on the first insulating layer to serve as a gate dielectric layer. A second conductive layer is formed in the upper trench to serve as a control gate. A vertical nitride read-only memory cell is also disclosed.
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