Invention Grant
US06813412B2 Mems element having perpendicular portion formed from substrate 失效
具有由基板形成的垂直部分的金属元件

  • Patent Title: Mems element having perpendicular portion formed from substrate
  • Patent Title (中): 具有由基板形成的垂直部分的金属元件
  • Application No.: US09915232
    Application Date: 2001-07-24
  • Publication No.: US06813412B2
    Publication Date: 2004-11-02
  • Inventor: Chuang-Chia Lin
  • Applicant: Chuang-Chia Lin
  • Main IPC: G02B635
  • IPC: G02B635
Mems element having perpendicular portion formed from substrate
Abstract:
A microelectromechanical systems (MEMS) element and a MEMS optical switch are described. The MEMS element comprises a crystalline and moveable element is moveably attached to the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to a plane of the substrate. The crystal structure of the perpendicular portion and substrate are substantially similar. The moveable element is capable of motion substantially constrained to a plane oriented substantially perpendicular to a plane of the substrate. In at least one position, a part of a perpendicular portion of the moveable element projects beyond a surface of the substrate. The moveable element may be retained in place by a latch. An array of such structures can be implemented to work as an optical switch. The optical switch may comprise a crystalline substrate and one or more moveable elements moveably attached to the substrate. The various embodiments provide for a robust and reliable MEMS elements that may be simply fabricated and densely packed.
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