Coriolis effect mass flow meter and gyroscope

    公开(公告)号:US20100018326A1

    公开(公告)日:2010-01-28

    申请号:US12148162

    申请日:2008-04-17

    CPC classification number: G01F1/8454

    Abstract: A Coriolis effect device includes a housing defining an interior chamber having a central axis, an inlet, an outlet, a leading disc and a trailing disc. Each disc is supported for oscillatory movement within the interior chamber of the housing. The leading disc defines a leading flow path in fluid communication with the inlet and interior chamber, wherein a portion of the leading flow path extends radially with respect to the central axis. The trailing disc is axially spaced from the leading disc. The trailing disc defines a trailing flow path in fluid communication with the interior chamber and the outlet, wherein a portion of the trailing flow path extends radially with respect to the central axis. A phase difference between leading and trailing oscillating signals picked up from the disc movement can be used to determine a mass flow rate of fluid passing from the inlet to the outlet.

    Self-aligned micro hinges
    3.
    发明授权
    Self-aligned micro hinges 失效
    自对准微铰链

    公开(公告)号:US06755982B2

    公开(公告)日:2004-06-29

    申请号:US10040687

    申请日:2002-01-07

    Inventor: Chuang-Chia Lin

    CPC classification number: B32B1/00 B81B2201/042 B81C1/00198 Y10T428/249921

    Abstract: A surface micromachining process for the fabrication of three-dimensional micro-hinges directly on silicon on insulator wafers. The process includes the steps of (a) defining openings around the surface of a desired hinge pin in a single layer of a silicon single crystal; (b) subjecting the openings to an etching process for removal of oxide material that is located in contiguous relation to the openings under the area of a hinge; (c) growing thermal oxide to define a gap between the hinge pin and a subsequently deposited polysilicon cap; (d) immediately depositing a thin layer of a chemical vapor deposited oxide sufficient to cover fine gaps not completely covered by the thermal oxide; depositing polysilicon and etching to define a hinge cap; and further etching to allow a mirror to be lifted out of the silicon wafer.

    Abstract translation: 用于直接在硅绝缘体晶片上制造三维微铰链的表面微加工工艺。 该方法包括以下步骤:(a)在单层硅单晶中限定所需铰链销的表面周围的开口; (b)对开口进行蚀刻处理以除去位于与铰链区域下方的开口相邻的氧化物材料; (c)生长热氧化物以限定铰链销和随后沉积的多晶硅盖之间的间隙; (d)立即沉积化学气相沉积氧化物的薄层,足以覆盖未被热氧化物完全覆盖的微细间隙; 沉积多晶硅和蚀刻以限定铰链盖; 并进一步蚀刻以允许将镜子提升出硅晶片。

    Mechanical latch locking detection sensors
    4.
    发明授权
    Mechanical latch locking detection sensors 失效
    机械锁定锁定检测传感器

    公开(公告)号:US07994940B2

    公开(公告)日:2011-08-09

    申请号:US12807351

    申请日:2010-09-02

    CPC classification number: E05B39/04 B64D29/06 E05C19/145 Y10T292/0948

    Abstract: The invention provides a sensor for determining when a latch for securing an engine cowl on an aircraft is secured by detecting the proximity of a latch hook and a latch pin. The sensor includes a resonant circuit configured and adapted to transmit a status signal when the latch is in a secured state. The sensor also includes a means for conveying status information of the latch to a location remote from the latch based on the status signal, the conveying means being operably connected to the resonant circuit. The invention also provides a method of determining when a latch is open or secured by detecting the proximity of a latch hook and a latch pin.

    Abstract translation: 本发明提供了一种传感器,用于通过检测闩锁钩和闩锁销的接近来确定何时用于固定飞机上的发动机罩的闩锁。 所述传感器包括谐振电路,所述谐振电路经配置并适于在所述闩锁处于安全状态时发送状态信号。 传感器还包括用于基于状态信号将闩锁的状态信息传送到远离闩锁的位置的装置,该传送装置可操作地连接到谐振电路。 本发明还提供了一种通过检测闩锁钩和闩锁销的接近来确定闩锁何时打开或固定的方法。

    Mechanical latch locking detection sensors

    公开(公告)号:US20110018741A1

    公开(公告)日:2011-01-27

    申请号:US12807351

    申请日:2010-09-02

    CPC classification number: E05B39/04 B64D29/06 E05C19/145 Y10T292/0948

    Abstract: The invention provides a sensor for determining when a latch for securing an engine cowl on an aircraft is secured by detecting the proximity of a latch hook and a latch pin. The sensor includes a resonant circuit configured and adapted to transmit a status signal when the latch is in a secured state. The sensor also includes a means for conveying status information of the latch to a location remote from the latch based on the status signal, the conveying means being operably connected to the resonant circuit. The invention also provides a method of determining when a latch is open or secured by detecting the proximity of a latch hook and a latch pin.

    Wireless surface acoustic wave-based proximity sensor, sensing system and method
    6.
    发明授权
    Wireless surface acoustic wave-based proximity sensor, sensing system and method 失效
    无线声表面波接近传感器,感应系统及方法

    公开(公告)号:US07834514B2

    公开(公告)日:2010-11-16

    申请号:US11977301

    申请日:2007-10-24

    CPC classification number: H03K17/94 H03K17/95 H03K17/97 H03K2217/96011

    Abstract: The subject invention is related to wireless proximity sensor and sensing system for detecting the position of an object. The system includes a transceiver for providing wireless communication with a passive wireless surface acoustic wave (SAW) proximity sensor. The wireless proximity sensor receives a wireless signal from the transceiver, which powers the SAW device and in turn transmits a signal back to the transceiver that includes information about the position of an object. The wireless proximity sensor uses one or more SAW devices with a sensing element made of magnetostrictive material, in conjunction with one or more magnets and one or more targets that are positioned relative to an object. The movement of the target(s) in relation to the proximity sensor operatively produces a mechanical response due to the shift in the magnetic field of the sensing element. The sensing element in turn enhances the magnetic field of the SAW device to which it is attached, and this information is transmitted to the transceiver as information about the position of an object.

    Abstract translation: 本发明涉及用于检测物体位置的无线接近传感器和感测系统。 该系统包括用于提供与被动无线表面声波(SAW)接近传感器的无线通信的收发器。 无线接近传感器接收来自收发器的无线信号,该无线信号为SAW器件供电,然后将信号发送回收发器,该信号包括关于对象位置的信息。 无线接近传感器使用具有由磁致伸缩材料制成的感测元件的一个或多个SAW器件,其结合一个或多个磁体和相对于物体定位的一个或多个靶。 相对于接近传感器,目标的运动由于感测元件的磁场的移动而可操作地产生机械响应。 感测元件又增强了与其连接的SAW器件的磁场,并将该信息作为关于对象位置的信息传送到收发器。

    Force balanced impeller flow meter for mass flow rate control
    7.
    发明授权
    Force balanced impeller flow meter for mass flow rate control 失效
    强力平衡叶轮流量计,用于质量流量控制

    公开(公告)号:US07603915B2

    公开(公告)日:2009-10-20

    申请号:US11895196

    申请日:2007-08-23

    CPC classification number: G01F1/28 G01F1/78

    Abstract: A force balanced mass flow meter is disclosed that includes a cylindrical sensor housing having an interior bore, an impeller body supported for axial rotation within the interior bore of the sensor housing, and including structure for converting fluid inertia into flow induced torque when fluid flows relative to the impeller body, a proximity sensor for measuring a rotation angle of the impeller body relative to the sensor housing, an electromagnet for generating a magnetic field about the sensor housing to prevent rotation of the impeller body, electronics for determining electrical values from the proximity sensor when fluid flows relative to the impeller body and a controller for controlling current supplied to the electromagnet in response to electrical values determined from the proximity sensor, to generate a magnetic field sufficient to prevent impeller rotation.

    Abstract translation: 公开了一种力平衡质量流量计,其包括具有内孔的圆柱形传感器壳体,被支撑用于在传感器壳体的内孔内轴向旋转的叶轮体,并且包括当流体相对流动时将流体惯性转换为流动感应扭矩的结构 到叶轮本体,用于测量叶轮本体相对于传感器壳体的旋转角度的接近传感器,用于在传感器壳体周围产生磁场以防止叶轮本体旋转的电磁体,用于确定来自接近 当流体相对于叶轮本体流动时传感器;以及控制器,用于响应于从接近传感器确定的电值控制提供给电磁体的电流,以产生足以防止叶轮旋转的磁场。

    Wireless surface acoustic wave-based proximity sensor, sensing system and method
    8.
    发明申请
    Wireless surface acoustic wave-based proximity sensor, sensing system and method 失效
    无线声表面波接近传感器,感应系统及方法

    公开(公告)号:US20090109048A1

    公开(公告)日:2009-04-30

    申请号:US11977301

    申请日:2007-10-24

    CPC classification number: H03K17/94 H03K17/95 H03K17/97 H03K2217/96011

    Abstract: The subject invention is related to wireless proximity sensor and sensing system for detecting the position of an object. The system includes a transceiver for providing wireless communication with a passive wireless surface acoustic wave (SAW) proximity sensor. The wireless proximity sensor receives a wireless signal from the transceiver, which powers the SAW device and in turn transmits a signal back to the transceiver that includes information about the position of an object. The wireless proximity sensor uses one or more SAW devices with a sensing element made of magnetostrictive material, in conjunction with one or more magnets and one or more targets that are positioned relative to an object. The movement of the target(s) in relation to the proximity sensor operatively produces a mechanical response due to the shift in the magnetic field of the sensing element. The sensing element in turn enhances the magnetic field of the SAW device to which it is attached, and this information is transmitted to the transceiver as information about the position of an object.

    Abstract translation: 本发明涉及用于检测物体位置的无线接近传感器和感测系统。 该系统包括用于提供与被动无线表面声波(SAW)接近传感器的无线通信的收发器。 无线接近传感器接收来自收发器的无线信号,该无线信号为SAW器件供电,然后将信号发送回收发器,该信号包括关于对象位置的信息。 无线接近传感器使用具有由磁致伸缩材料制成的感测元件的一个或多个SAW器件,其结合一个或多个磁体和相对于物体定位的一个或多个靶。 相对于接近传感器,目标的运动由于感测元件的磁场的移动而可操作地产生机械响应。 感测元件又增强了与其连接的SAW器件的磁场,并将该信息作为关于对象位置的信息传送到收发器。

    Mems element having perpendicular portion formed from substrate
    9.
    发明授权
    Mems element having perpendicular portion formed from substrate 失效
    具有由基板形成的垂直部分的金属元件

    公开(公告)号:US06813412B2

    公开(公告)日:2004-11-02

    申请号:US09915232

    申请日:2001-07-24

    Inventor: Chuang-Chia Lin

    Abstract: A microelectromechanical systems (MEMS) element and a MEMS optical switch are described. The MEMS element comprises a crystalline and moveable element is moveably attached to the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to a plane of the substrate. The crystal structure of the perpendicular portion and substrate are substantially similar. The moveable element is capable of motion substantially constrained to a plane oriented substantially perpendicular to a plane of the substrate. In at least one position, a part of a perpendicular portion of the moveable element projects beyond a surface of the substrate. The moveable element may be retained in place by a latch. An array of such structures can be implemented to work as an optical switch. The optical switch may comprise a crystalline substrate and one or more moveable elements moveably attached to the substrate. The various embodiments provide for a robust and reliable MEMS elements that may be simply fabricated and densely packed.

    Abstract translation: 描述了微机电系统(MEMS)元件和MEMS光开关。 MEMS元件包括可移动地附接到基底的结晶和可移动元件。 可移动元件包括垂直于基本垂直于基底平面的垂直部分。 垂直部分和基底的晶体结构基本相似。 可移动元件能够基本上约束到基本上垂直于衬底的平面定向的平面的运动。 在至少一个位置中,可移动元件的垂直部分的一部分突出超过衬底的表面。 可移动元件可以通过闩锁保持在适当的位置。 可以实现这种结构的阵列以用作光学开关。 光学开关可以包括结晶衬底和可移动地附接到衬底的一个或多个可移动元件。 各种实施例提供了可以简单地制造和密集包装的鲁棒且可靠的MEMS元件。

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