发明授权
- 专利标题： Low-temperature processing of a ferroelectric strontium bismuth tantalate layer, and fabrication of ferroelectric components using the layer
- 专利标题（中）： 铁电锶铋钽酸盐层的低温加工，以及使用该层的铁电元件的制造
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申请号： US10372983申请日： 2003-02-24
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公开(公告)号： US06815224B2公开(公告)日： 2004-11-09
- 发明人: Harald Bachhofer , Thomas Haneder , Oswald Spindler , Rainer Waser
- 申请人： Harald Bachhofer , Thomas Haneder , Oswald Spindler , Rainer Waser
- 优先权： DE10041699 20000824
- 主分类号： H01L2100
- IPC分类号： H01L2100
摘要：
In a method for producing ferroelectric strontium bismuth tantalate having the composition SrxBiyTa2O9 (SBT) or SrxBiy(Ta, Nb)2O9 (SBTN), the element strontium, which is normally present in an amount y=2, is provided in excess in a range from 2.1≦y≦3.0. This makes it possible to carry out the heat treatment step for converting the deposited material into the ferroelectric phase at a temperature T1, which is lower than 700° C. In addition, the strontium content x can be reduced from a nominal value of 1 to 0.7.
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