发明授权
- 专利标题: Inductively-coupled toroidal plasma source
- 专利标题(中): 电感耦合环形等离子体源
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申请号: US09804650申请日: 2001-03-12
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公开(公告)号: US06815633B1公开(公告)日: 2004-11-09
- 发明人: Xing Chen , William M. Holber , Andrew Barnett Cowe , Eric Georgelis , Ilya M. Bystyak , Andrzej Bortkiewicz
- 申请人: Xing Chen , William M. Holber , Andrew Barnett Cowe , Eric Georgelis , Ilya M. Bystyak , Andrzej Bortkiewicz
- 主分类号: B23K1000
- IPC分类号: B23K1000
摘要:
Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
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