发明授权
US06818358B1 Method of extending the areas of clear field phase shift generation 有权
扩展清除场相移生成区域的方法

Method of extending the areas of clear field phase shift generation
摘要:
An exemplary Full Phase patterning method involves patterning gates to increase process margins from conventional methods. This technique can define all poly patterns with a phase mask, using only a field or trim mask to resolve conflicts in the phase mask. The trim mask exposes a series of lines that either separates the different phase areas where patterns not desired or minimizes the range of sizes of the phase patterns next to a critical gate area.
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