Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US10404141Application Date: 2003-04-02
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Publication No.: US06818945B2Publication Date: 2004-11-16
- Inventor: Yusuke Kawaguchi , Syotaro Ono , Akio Nakagawa
- Applicant: Yusuke Kawaguchi , Syotaro Ono , Akio Nakagawa
- Priority: JP2003-026086 20030203
- Main IPC: H01L2972
- IPC: H01L2972

Abstract:
A semiconductor device according to one embodiment of the present invention includes: a semiconductor substrate of a first conductive type; a semiconductor layer of the first conductive type formed on the semiconductor substrate; a base layer of a second conductive type formed on the semiconductor layer; a plurality of columns of stripe trenches formed at predetermined intervals from a surface of the base layer by a predetermined depth; insulating films formed on side surfaces and bottoms of the trenches, respectively; source layers of the first conductive type formed on surface layer portions of the base layer between the trenches, respectively; stripe contact layers of the second conductive type formed each at centers of the surface layer portions of the base layer between the trenches, respectively; a gate electrode formed in every other trench among the plurality of columns of trenches; source electrodes formed in the trenches other than the trenches in which the gate electrodes are formed and on the source layers and the contact layers, respectively; and a drain electrode formed on a rear surface of the semiconductor substrate.
Public/Granted literature
- US20040150036A1 Semiconductor device Public/Granted day:2004-08-05
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