发明授权
US06820322B2 Method of making a spin valve sensor with a free layer structure sputter deposited in a nitrogen atmosphere
失效
制造在氮气气氛中溅射沉积的具有自由层结构的自旋阀传感器的方法
- 专利标题： Method of making a spin valve sensor with a free layer structure sputter deposited in a nitrogen atmosphere
- 专利标题（中）： 制造在氮气气氛中溅射沉积的具有自由层结构的自旋阀传感器的方法
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申请号： US09873005申请日： 2001-05-31
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公开(公告)号： US06820322B2公开(公告)日： 2004-11-23
- 发明人: Mustafa Pinarbasi
- 申请人： Mustafa Pinarbasi
- 主分类号： G11B5127
- IPC分类号： G11B5127
摘要：
A method makes a spin valve sensor of a magnetic read head which includes the steps of forming a ferromagnetic pinned layer structure that has a magnetic moment, forming a pinning layer exchange coupled to the pinned layer structure for pinning the magnetic moment of the pinned layer structure, forming a free layer structure, forming a nonmagnetic electrically conductive spacer layer between the free layer and the pinned layer structure and the forming of the free layer structure including the step of sputter depositing at least a first free layer composed of cobalt iron directly on the spacer layer in a nitrogen atmosphere.
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