发明授权
US06821861B1 Method for fabricating an electrode arrangement for charge storage
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用于制造用于电荷存储的电极装置的方法
- 专利标题: Method for fabricating an electrode arrangement for charge storage
- 专利标题(中): 用于制造用于电荷存储的电极装置的方法
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申请号: US10631554申请日: 2003-07-31
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公开(公告)号: US06821861B1公开(公告)日: 2004-11-23
- 发明人: Matthias Goldbach , Thomas Hecht
- 申请人: Matthias Goldbach , Thomas Hecht
- 主分类号: H01L2120
- IPC分类号: H01L2120
摘要:
The invention relates to an electrode arrangement for charge storage with an external trench electrode (202; 406), embodied along the wall of a trench provided in a substrate (401) and electrically insulated on both sides in the trench by a first and a second dielectric (104; 405, 409); an internal trench electrode (201; 410), serving as counter-electrode to the external trench electrode (201; 406) and insulated by the second dielectric (104; 409) and a substrate electrode (201; 403), which is insulated by the first dielectric (104; 405) outside the trench, which serves as counter-electrode to the external trench electrode (202; 406) and is connected to the internal trench electrode (201; 410) in the upper trench region.
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