发明授权
US06821861B1 Method for fabricating an electrode arrangement for charge storage 失效
用于制造用于电荷存储的电极装置的方法

  • 专利标题: Method for fabricating an electrode arrangement for charge storage
  • 专利标题(中): 用于制造用于电荷存储的电极装置的方法
  • 申请号: US10631554
    申请日: 2003-07-31
  • 公开(公告)号: US06821861B1
    公开(公告)日: 2004-11-23
  • 发明人: Matthias GoldbachThomas Hecht
  • 申请人: Matthias GoldbachThomas Hecht
  • 主分类号: H01L2120
  • IPC分类号: H01L2120
Method for fabricating an electrode arrangement for charge storage
摘要:
The invention relates to an electrode arrangement for charge storage with an external trench electrode (202; 406), embodied along the wall of a trench provided in a substrate (401) and electrically insulated on both sides in the trench by a first and a second dielectric (104; 405, 409); an internal trench electrode (201; 410), serving as counter-electrode to the external trench electrode (201; 406) and insulated by the second dielectric (104; 409) and a substrate electrode (201; 403), which is insulated by the first dielectric (104; 405) outside the trench, which serves as counter-electrode to the external trench electrode (202; 406) and is connected to the internal trench electrode (201; 410) in the upper trench region.
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