发明授权
- 专利标题： Optical beam guidance system and method for preventing contamination of optical components contained therein
- 专利标题（中）： 光束引导系统和防止其中包含的光学部件的污染的方法
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申请号： US10079580申请日： 2002-02-22
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公开(公告)号： US06824277B2公开(公告)日： 2004-11-30
- 发明人: Ansgar Freitag , Ulrich Bingel , Josef Distl , Uwe W. Hamm
- 申请人： Ansgar Freitag , Ulrich Bingel , Josef Distl , Uwe W. Hamm
- 优先权： DE10109031 20010224
- 主分类号： G02B702
- IPC分类号： G02B702
摘要：
A method for reducing the contamination of at least one optical component (2, 3) contained in the beam guidance space (6) and held by a frame (4, 5) defining the beam guidance space and a corresponding optical beam guidance system. The surfaces of the frame bordering on the beam guidance space are at least partially coated with a degassing barrier layer (7) that preferably does not increase reflectivity. The method and system have use, for example, in lithography irradiation systems working with UV light.