发明授权
- 专利标题: Electron-emitting device, electron source, and manufacture method for image-forming apparatus
- 专利标题(中): 电子发射器件,电子源和图像形成装置的制造方法
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申请号: US10320394申请日: 2002-12-17
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公开(公告)号: US06824437B2公开(公告)日: 2004-11-30
- 发明人: Kazuhiro Jindai , Toshikazu Ohnishi
- 申请人: Kazuhiro Jindai , Toshikazu Ohnishi
- 优先权: JP11-049218 19990225; JP11-051497 19990226; JP2000-052227 20000224
- 主分类号: H01J902
- IPC分类号: H01J902
摘要:
A method of manufacturing an electron-emitting device has a step of forming a pair of conductors on a substrate, the conductors being spaced from each other, and an activation process of depositing carbon or carbon compound on at least one side of the pair of conductors in an atmosphere of carbon compound gas. The activation process includes a plurality of processes of two or more stages including a first process and a second process. The first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial pressure of the gas in the second process, with the second process being the last activation process.
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