发明授权
- 专利标题: Methods of forming openings extending through electrically insulative material to electrically conductive material
- 专利标题(中): 形成通过电绝缘材料延伸到导电材料的开口的方法
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申请号: US10454303申请日: 2003-06-03
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公开(公告)号: US06828238B1公开(公告)日: 2004-12-07
- 发明人: Michael J. Hermes
- 申请人: Michael J. Hermes
- 主分类号: H01L21311
- IPC分类号: H01L21311
摘要:
The invention includes methods of forming openings extending through electrically insulative layers to electrically conductive materials. In an exemplary aspect, a substrate is provided which supports a stack and an electrical node. The stack comprises an electrically insulative cap over an electrically conductive material. An electrically insulative layer is formed over the stack and over the electrical node. A first etch is utilized to etch through the electrically insulative layer to the electrical node and to the electrically insulative cap. The first etch etches partially into the electrically insulative cap but does not etch entirely through the electrically insulative cap. A second etch is utilized after the first etch to etch entirely through the electrically insulative cap to the electrically conductive material of the stack.
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