发明授权
- 专利标题： Method for the removing of adsorbed molecules from a chamber
- 专利标题（中）： 从室中去除吸附分子的方法
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申请号： US10220001申请日： 2002-09-25
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公开(公告)号： US06830631B2公开(公告)日： 2004-12-14
- 发明人: Zsolt Nenyei , Wilfried Lerch , Jürgen Niess , Thomas Graf
- 申请人： Zsolt Nenyei , Wilfried Lerch , Jürgen Niess , Thomas Graf
- 优先权： DE10008829 20000225
- 主分类号： B08B704
- IPC分类号： B08B704
摘要：
A method of removing first molecules adsorbed on the surfaces of a chamber and/or at least one object found in the chamber is provided. Second, polar molecules that have a desorptive effect on the first molecules are introduced into the chamber. The second molecules comprise nitrogen and hydrogen, and especially NH3 molecules.
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