发明授权
US06830780B2 Methods for preparing brazeable metallizations for diamond components 有权
用于制备金刚石组分的可钎焊金属化的方法

  • 专利标题: Methods for preparing brazeable metallizations for diamond components
  • 专利标题(中): 用于制备金刚石组分的可钎焊金属化的方法
  • 申请号: US09965478
    申请日: 2001-09-27
  • 公开(公告)号: US06830780B2
    公开(公告)日: 2004-12-14
  • 发明人: Ronald Petkie
  • 申请人: Ronald Petkie
  • 主分类号: C23C1606
  • IPC分类号: C23C1606
Methods for preparing brazeable metallizations for diamond components
摘要:
A multilayer brazeable metallization structure for diamond components and method for producing it are described. The brazeable metallization finds particular application for the attachment of diamond components such as heat spreaders in electronic packages that incorporate high power semiconductor devices. In the present invention, a diamond component is provided with a multilayer coating of metals including depositing a first layer of chromium for adhesion onto at least a portion of the diamond component, depositing a second barrier layer of a refractory metal for a barrier onto at least portion of the chromium layer, and a top layer of copper, silver or gold for wetting. This top layer is thick (greater than 5 microns), without sacrificing resistance to delamination, particularly at brazing conditions. It is obtained by depositing a layer of a first metal onto at least a portion of the refractory metal layer, and depositing a layer of a second metal onto at least a portion of the first metal layer. The refractory metals for the barrier layer include tungsten, molybdenum, tantalum, niobium, or tungsten-chromium alloy. This multilayer metallization structure provides a robust interface between diamond and standard brazing alloys which are used to join the diamond to electrical leads or a flange made of metals such as copper-tungsten. The interfacial adhesion between the metallization and the diamond is sufficient to withstand exposure to brazing at temperatures less than or equal to 1,100° C. in inert gas atmospheres that may contain hydrogen.
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