发明授权
US06831363B2 Structure and method for reducing thermo-mechanical stress in stacked vias
有权
用于降低堆叠过孔中热机械应力的结构和方法
- 专利标题: Structure and method for reducing thermo-mechanical stress in stacked vias
- 专利标题(中): 用于降低堆叠过孔中热机械应力的结构和方法
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申请号: US10319032申请日: 2002-12-12
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公开(公告)号: US06831363B2公开(公告)日: 2004-12-14
- 发明人: Timothy J. Dalton , Sanjit K. Das , Brett H. Engel , Brian W. Herbst , Habib Hichri , Bernd E. Kastenmeier , Kelly Malone , Jeffrey R. Marino , Arthur Martin , Vincent J. McGahay , Ian D. Melville , Chandrasekhar Narayan , Kevin S. Petrarca , Richard P. Volant
- 申请人: Timothy J. Dalton , Sanjit K. Das , Brett H. Engel , Brian W. Herbst , Habib Hichri , Bernd E. Kastenmeier , Kelly Malone , Jeffrey R. Marino , Arthur Martin , Vincent J. McGahay , Ian D. Melville , Chandrasekhar Narayan , Kevin S. Petrarca , Richard P. Volant
- 主分类号: H01L2348
- IPC分类号: H01L2348
摘要:
An interconnect structure for a semiconductor device includes an organic, low dielectric constant (low-k) dielectric layer formed over a lower metallization level. A via formed is within the low-k dielectric layer, the via connecting a lower metallization line formed in the lower metallization level with an upper metallization line formed in an upper metallization level. The via is surrounded by a structural collar selected from a material having a coefficient of thermal expansion (CTE) so as to protect the via from shearing forces following a thermal expansion of the low-k dielectric layer.
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