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US06831363B2 Structure and method for reducing thermo-mechanical stress in stacked vias 有权
用于降低堆叠过孔中热机械应力的结构和方法

Structure and method for reducing thermo-mechanical stress in stacked vias
摘要:
An interconnect structure for a semiconductor device includes an organic, low dielectric constant (low-k) dielectric layer formed over a lower metallization level. A via formed is within the low-k dielectric layer, the via connecting a lower metallization line formed in the lower metallization level with an upper metallization line formed in an upper metallization level. The via is surrounded by a structural collar selected from a material having a coefficient of thermal expansion (CTE) so as to protect the via from shearing forces following a thermal expansion of the low-k dielectric layer.
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